ALIO Industries Hexapod Stage
ALIO's hybrid hexapod capable of tilting ±30°! 360° rotation is also possible! High rigidity long stroke hexapod stage.
ALIO Industries' patent technology. A new type of hexapod, the "Hybrid Hexapod," which combines the degrees of freedom of parallel kinematics with the precision and rigidity of serial kinematics. Its significant feature is that, despite being a long-stroke hexapod, it achieves a repeatability of ±80nm even in the standard configuration. Compared to conventional systems, it offers major advantages such as compactness, high rigidity, long stroke, and high precision, enabling entirely new system designs for applications like precision machining and precision alignment.
- Company：オーテックス
- Price：Other
